Characterization of Si nanorods by spectroscopic ellipsometry with efficient theoretical modeling

Hsu, S.-H.S.-H.HsuLiu, E.-S.E.-S.LiuChang, Y.-C.Y.-C.ChangHilfiker, J.N.J.N.HilfikerKim, Y.D.Y.D.KimKim, T.J.T.J.KimLin, C.-J.C.-J.LinGONG-RU LINLin, Chun-JungChun-JungLin2018-09-102018-09-102008http://www.scopus.com/inward/record.url?eid=2-s2.0-54849421851&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/340883application/pdfapplication/pdfCharacterization of Si nanorods by spectroscopic ellipsometry with efficient theoretical modelingjournal article10.1002/pssa.200777832