Demonstration of an isolated buried channel field-effect transistor fabricated via in situ patterned electron-beam deposition of Si in GaAs

Mills Jr, APAPMills JrMINGHWEI HONGMannaerts, JPJPMannaertsPfeiffer, LNLNPfeifferWest, KWKWWestMartin, SSMartinRuel, RRRRRuelBaldwin, KWKWBaldwinRowe, JEJERowe2018-09-102018-09-101995http://scholars.lib.ntu.edu.tw/handle/123456789/315723Demonstration of an isolated buried channel field-effect transistor fabricated via in situ patterned electron-beam deposition of Si in GaAsjournal article