The ferroelectricity and crystallinity of zirconia, hafnia and hafnium zirconium oxide (HZO) ultrathin films prepared by atomic layer deposition with and without post-annealing

Hsu T.-Y.Lin B.-T.Shieh J.TZONG-LIN JAY SHIEHMIIN-JANG CHEN2019-11-272019-11-2720189780791851944https://www.scopus.com/inward/record.uri?eid=2-s2.0-85057372073&doi=10.1115%2fSMASIS2018-7946&partnerID=40&md5=ccfa64bbaf90e7623050a40cc35c1375https://scholars.lib.ntu.edu.tw/handle/123456789/433223The ferroelectricity and crystallinity of zirconia, hafnia and hafnium zirconium oxide (HZO) ultrathin films prepared by atomic layer deposition with and without post-annealingconference paper10.1115/SMASIS2018-79462-s2.0-85057372073