Cheng, F. T.F. T.ChengMINN-TSONG LIN2019-12-272019-12-2720010894-6507https://scholars.lib.ntu.edu.tw/handle/123456789/443541[SDGs]SDG9Enhancement of semiconductor equipment communications using a web-enabled equipment driverjournal article10.1109/66.964324WOS:000172231100009