2020-08-012024-05-18https://scholars.lib.ntu.edu.tw/handle/123456789/702998摘要：可撓性感測技術在可攜式、穿戴式裝置以及機器人應用上日趨重要，本計畫目標即在整合可撓性氧化物電晶體前端放大電路與可撓/可拉伸式感測元件，開發肌膚貼附型多功能感測電子裝置，以用於生理訊號的量測。計畫包含四個子題，分別為(一)可撓性氧化物薄膜電晶體差分放大電路開發；(二)基於氧化亞錫通道層之互補式氧化物薄膜電晶體技術研究；(三)可拉伸式感測電極的開發；(四)可撓性溫度與濕度感測器及其介面電路研究。子題一所開發之差分放大電路將搭配子題三之可拉伸式感測電極，應用於生理電訊號(如：心電或肌電訊號等)量測；子題二將利用分離閘極結構及電荷選擇性接觸層使雙極性氧化亞錫薄膜電晶體達到單極性操作，藉此發展基於單一通道層之互補式氧化物薄膜電晶體技術，並提供子題一進行互補式差分放大電路製作；子題三將採用彎曲結構開發可拉伸式感測電極；子題四則計畫採用高分子與奈米碳材做為溫度感測器主動層，藉由多孔性奈米材料搭配微電漿活化技術製作濕度感測器，再利用子題一與二中之氧化物薄膜電晶體技術開發環形震盪電路以進行感測訊號擷取。最後將整合前述三項感測器於單一基板上，並透過非等向性導電薄膜與可撓性氧化物電晶體前端放大電路接合，完成肌膚貼附型多功能感測電子貼片之開發。<br> Abstract: Flexible large-area electronic sensors have shown great potential in wearable and ubiquitous devices and in robotic applications. The goal of this project is to develop skin-mounted multi-function sensing patches, which comprises flexible/compliant sensors integrated with flexible CMOS oxide-TFT-based front-end amplifiers and/or interface circuits for physiology signal monitoring. To achieve the goal, the proposed project is divided into four parts: (1) development of flexible oxide-TFT-based differential amplifier circuits, (2) development of complementary TFT technology based on single SnO channel layer, (3) development of stretchable sensing electrodes, (4) development of flexible/compliant temperature and humidity sensors and the corresponding interface circuits. The differential amplifier circuits developed in task 1 will be integrated with the stretchable sensing electrodes developed in task 3 for bio-potential (such as electrocardiography or electromyography) measurements. In task 2, unipolar operation of TFTs with ambipolar SnO channels will be realized by using split gates to suppress the unwanted type of carriers or by introducing doped or charge-selective metallic contact layers to limit the type of injected carriers. The complementary oxide-TFT technology developed in task 2 will then be used to implement the differential amplifiers in task 1. In task 3, serpentine structures will be adopted to achieve mechanical stretchability of the sensing electrodes. In task 4, temperature sensors based on composites of conductive polymers and carbon-based nanomaterials will be implemented, and humidity sensors configured with in-situ activation of porous sensing materials by local microplasma treatment will be developed. The oxide TFT technology developed in tasks 1 and 2 will be used to construct ring oscillators as the readout circuits for humidify sensors. Finally, the compliant bio-potential, temperature and humidity sensors will be integrated with the flexible complementary oxide-TFT-based front-end amplifiers and/or interface circuits to realize skin-mounted multi-function sensing patches.互補式氧化物薄膜電晶體技術可撓性電子可拉伸式感測電極生理電訊號量測溫度感測器濕度感測器complementary oxide thin-film transistor technologyflexible electronicsstretchable sensing electrodesbio-potential measurementtemperature sensorhumidity sensor