Chen C.-S.Yiu P.Li C.-L.Chu J.P.Shek C.-H.Hsueh C.-H.CHUN-HWAY HSUEH2019-09-252019-09-25201409215093https://scholars.lib.ntu.edu.tw/handle/123456789/425050Zr46Ti26Ni28 thin film metallic glass was fabricated by radio frequency magnetron single target sputtering on Si and stainless steel substrates. The as-deposited film was found to be fully amorphous with high glass transition and crystallization temperatures of 466¢XC and 502¢XC, respectively. Its hardness progressively increased from 6.2GPa to as high as 11.1GPa when subjected to annealing near the glass-transition temperature at 450¢XC. It was also of good adhesive strength and scratch resistance after the annealing treatment at 400¢XC. Transmission electron microscopy results revealed annealing-induced nanocrystals that accounted for such superior mechanical properties. With the above unique properties, Zr-Ti-Ni thin film metallic glass has the potential for the fabrication of high strength micro parts and protective coating. ? 2014 Elsevier B.V.Amorphous alloysAnnealingHardness measurementMechanical characterizationNanoindentationShear bandsjournal article10.1016/j.msea.2014.03.1442-s2.0-84900466432https://www2.scopus.com/inward/record.uri?eid=2-s2.0-84900466432&doi=10.1016%2fj.msea.2014.03.144&partnerID=40&md5=604d958eff78e814b82ba295a3319c15