Wu, S. K.S. K.WuChen, J. Z.J. Z.ChenWu, Y. J.Y. J.WuWang, J .Y.J .Y.WangYu, M. N.M. N.YuChen, F. R.F. R.ChenKai, J. J.J. J.Kai2010-10-202018-06-292010-10-202018-06-292001http://ntur.lib.ntu.edu.tw//handle/246246/218055en-USInterfacial microstructures of rf-sputtered TiNi shape memory alloy thin films on 100 Si