Uniform and Fatigue-Free Ferroelectric HZO with Record EBD of 6.3MV/cm and Record Final 2Pr of 64μC/cm2 at Record 5E12 Endurance Using Low Lattice Misfit (2.9%) β-W

Guan-Hua ChenYu-Tsung LiaoZefu ZhaoYu-Rui ChenYun-Wen ChenWei-Jen ChenWei-Teng HsuHao-Yi LuMing-Chang LiuYu-An ChenCHEE-WEE LIU2025-05-192025-05-192024-12-07https://www.scopus.com/record/display.uri?eid=2-s2.0-86000003070&origin=resultslisthttps://scholars.lib.ntu.edu.tw/handle/123456789/729483Uniform and Fatigue-Free Ferroelectric HZO with Record EBD of 6.3MV/cm and Record Final 2Pr of 64μC/cm2 at Record 5E12 Endurance Using Low Lattice Misfit (2.9%) β-Wconference paper10.1109/iedm50854.2024.10873405