Thermal diffusivity in amorphous silicon carbon nitride thin films by the traveling wave technique

Chattopadhyay, S.S.ChattopadhyayChen, L.C.L.C.ChenWu, C.T.C.T.WuChen, K.H.K.H.ChenWu, J.S.J.S.WuYANG-FANG CHENLehmann, G.G.LehmannHess, P.P.Hess2018-09-102018-09-102001http://www.scopus.com/inward/record.url?eid=2-s2.0-0035898427&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/292045Thermal diffusivity in amorphous silicon carbon nitride thin films by the traveling wave techniquejournal article10.1063/1.13866192-s2.0-0035898427