Chen, C.-Y.C.-Y.ChenNg, P.C.W.P.C.W.NgLiu, C.-H.C.-H.LiuShen, Y.-T.Y.-T.ShenTsai, K.-Y.K.-Y.TsaiLi, J.-H.J.-H.LiShieh, J.J.J.J.ShiehKUEN-YU TSAIJIA-HAN LI2020-01-172020-01-172013https://scholars.lib.ntu.edu.tw/handle/123456789/451458Direct-scatterometry-enabled optical-proximity-correction-model calibrationconference paper10.1117/12.20090642-s2.0-84878593681https://www.scopus.com/inward/record.uri?eid=2-s2.0-84878593681&doi=10.1117%2f12.2009064&partnerID=40&md5=e93288b1362ef6177c4f05bccb163f31