Self-aligned inversion-channel n-InGaAs, p-GaSb, and p-Ge MOSFETs with a common high $κ$ gate dielectric using a CMOS compatible process

Fu, CHCHFuMINGHWEI HONG et al.2018-09-102018-09-102015http://scholars.lib.ntu.edu.tw/handle/123456789/392292Self-aligned inversion-channel n-InGaAs, p-GaSb, and p-Ge MOSFETs with a common high $κ$ gate dielectric using a CMOS compatible processjournal article