Modeling and optimization of wafer-level spatial uniformity with the use of rational subgrouping

Dept. of Ind. Manage., National Taiwan Univ.Guo, Ruey-ShanRuey-ShanGuoChen, ArgonArgonChenLiu, CheeweeCheeweeLiuLin, A.A.LinARGON CHEN2007-04-192018-06-292007-04-192018-06-291999-10http://scholars.lib.ntu.edu.tw/handle/123456789/352896http://ntur.lib.ntu.edu.tw/bitstream/246246/2007041908561605/1/00808828.pdfapplication/pdf308168 bytesapplication/pdfen-USModeling and optimization of wafer-level spatial uniformity with the use of rational subgroupingconference paper10.1109/ISSM.1999.8088282-s2.0-0033328942http://ntur.lib.ntu.edu.tw/bitstream/246246/2007041908561605/1/00808828.pdf