Dept. of Mech. Eng., National Taiwan Univ.Yen, Po-ChingPo-ChingYenYang, Yao-JoeYao-JoeYang2007-04-192018-06-282007-04-192018-06-282003-06N/Ahttp://ntur.lib.ntu.edu.tw//handle/246246/2007041910042924application/pdf300845 bytesapplication/pdfen-USMacromodels of 3D lateral viscous damping effects for MEMS devicesjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/2007041910042924/1/01217148.pdf