Method of Forming a Nanotip Array in a Substrate by Forming Masks on Portions of the Substrate and Etching the Unmasked Portions

Kuei-Hsien ChenJih-Shang HwangHong-Chun LoDebajyoti DasLi-Chyong Chen2020-06-202020-06-202005https://scholars.lib.ntu.edu.tw/handle/123456789/503889Nov. 1?Method of Forming a Nanotip Array in a Substrate by Forming Masks on Portions of the Substrate and Etching the Unmasked Portionspatent