Hsu T.-CGONG-RU LINCHAO-HSIN WU2022-04-252022-04-2520211536125Xhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-85121392181&doi=10.1109%2fTNANO.2021.3133419&partnerID=40&md5=d37c52250d82b015136d29398b9c0df8https://scholars.lib.ntu.edu.tw/handle/123456789/607076Thisstudy demonstrates a Zn-diffusion few-mode (FM) vertical-cavity surface-emitting laser (VCSEL) with a performance of the quasi-single-mode, SMSR over 20 dB. The VCSELs have a stable output power due to the larger oxide aperture because high-order transverse modes are suppressed through impurity-induced disordering of Zn-diffusion. The VCSEL has a 6 μm oxide confined aperture diameter, and an Zn-diffusion aperture diameter of 4 μm, depth of 1 μm. It can reach a resonance frequency as high as 26.5 GHz at 9 mA and a modulation bandwidth exceeding 20 GHz. Error-free transmission at bit rates exceeding 50 Gbit/s with the encoded NRZ-OOK over 100 m of graded-index single-mode fiber (GI-SMF) is demonstrated. ? 2002-2012 IEEE.few-mode (FM)optical interconnectssingle-mode fiberVertical cavity surface emitting laser (VCSEL)Zn-diffusionDBR lasersFrequency modulationLaser pulsesSemiconductor lasersSingle mode fibersSurface emitting lasersTransceiversApertureDistributed-bragg-reflectorsFew-modeOptical interconnectSemiconductor process modelingSimulationSingle-mode fibersVertical cavity surface emitting laserVertical-cavity surface emitting laserDiffusionjournal article10.1109/TNANO.2021.31334192-s2.0-85121392181