Two-dimensional dopant profiling by electrostatic force microscopy using carbon nanotube modified cantilevers

CHIH-I WUChin, S.-C.S.-C.ChinChang, Y.-C.Y.-C.ChangHsu, C.-C.C.-C.HsuLin, W.-H.W.-H.LinWu, C.-I.C.-I.WuChang, C.-S.C.-S.ChangTsong, T.T.T.T.TsongWoon, W.-Y.W.-Y.WoonLin, L.-T.L.-T.LinTao, H.-J.H.-J.TaoCHIH-I WU2018-09-102018-09-102008http://www.scopus.com/inward/record.url?eid=2-s2.0-47249118727&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/341454Two-dimensional dopant profiling by electrostatic force microscopy using carbon nanotube modified cantileversjournal article10.1088/0957-4484/19/32/325703