Effect of rapid thermal annealing on carrier lifetimes of arsenic-ion-implanted GaAs

Lin, G.-R.G.-R.LinChen, W.-C.W.-C.ChenGanikhanov, F.F.GanikhanovChang, C.-S.C.-S.ChangPan, C.-L.C.-L.PanGONG-RU LIN2020-06-112020-06-111996https://scholars.lib.ntu.edu.tw/handle/123456789/500215Effect of rapid thermal annealing on carrier lifetimes of arsenic-ion-implanted GaAsjournal article10.1063/1.1171072-s2.0-0000173763https://www.scopus.com/inward/record.uri?eid=2-s2.0-0000173763&doi=10.1063%2f1.117107&partnerID=40&md5=cacc07cb7101f11e5751a17ca6cf6db6