A dynamic 3-D surface profilometer with nano-scale measurement resolution and MHz bandwidth for MEMS characterization

Chen, Liang-ChiaLiang-ChiaChenHuang, Yao-TingYao-TingHuangFan, Kuang-ChaoKuang-ChaoFan2010-10-192018-06-282010-10-192018-06-282007-01http://ntur.lib.ntu.edu.tw//handle/246246/217069en-USA dynamic 3-D surface profilometer with nano-scale measurement resolution and MHz bandwidth for MEMS characterizationjournal article10.1109/TMECH.2007.897268