Characterization of dressing behaviors and optimization technique in chemical mechanical polishing

Chen, K.R.K.R.ChenYoung, H.T.H.T.YoungChen, K.R.K.R.ChenYoung, H.T.H.T.YoungHONG-TSU YOUNG2018-09-102018-09-102009http://www.scopus.com/inward/record.url?eid=2-s2.0-73949107984&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/348469Characterization of dressing behaviors and optimization technique in chemical mechanical polishingconference paper10.1149/1.3123775