High-Q X-band and K-band micromachined spiral inductors for use in Si-based integrated circuits

Lu, L.-H.L.-H.LuPonchak, G.E.G.E.PonchakBhattacharya, P.P.BhattacharyaKatehi, L.P.B.L.P.B.KatehiLIANG-HUNG LU2020-06-112020-06-112000https://scholars.lib.ntu.edu.tw/handle/123456789/498252High-Q X-band and K-band micromachined spiral inductors for use in Si-based integrated circuitsconference paper10.1109/SMIC.2000.8443102-s2.0-84961992324https://www.scopus.com/inward/record.uri?eid=2-s2.0-84961992324&doi=10.1109%2fSMIC.2000.844310&partnerID=40&md5=e8c76cacf82bfc157ac8a4f1cb271c48