On the design of the latch mechanism for wafer containers in a SMIF environment

Lee, J.-J.J.-J.LeeChen, D.-Z.D.-Z.ChenPai, W.-M.W.-M.PaiJYH-JONE LEEDAR-ZEN CHEN2020-01-132020-01-132006https://scholars.lib.ntu.edu.tw/handle/123456789/447180On the design of the latch mechanism for wafer containers in a SMIF environmentjournal article10.1007/BF029163192-s2.0-34247170914https://www.scopus.com/inward/record.uri?eid=2-s2.0-34247170914&doi=10.1007%2fBF02916319&partnerID=40&md5=45d32b485c2cc95c04ae15fffcde2529