JUI-CHE TSAIHuang, S.S.HuangHah, D.D.HahWu, M.C.M.C.Wu2018-09-102018-09-102003https://www.scopus.com/inward/record.uri?eid=2-s2.0-41549142850&doi=10.1109%2fSENSOR.2003.1217130&partnerID=40&md5=7491fd4335a6cd795dd8064afa54f5f0http://scholars.lib.ntu.edu.tw/handle/123456789/303181A new high-port-count wavelength selective switch has been realized using two cross-scanning 1-axis analog micromirror arrays in a 4-f optical system. The number of output ports is increased from N to N2, where N is the maximum linear port count limited by optical diffraction. Using surface-micromachined micromirrors with hidden vertical combdrives, large scan angles (>±5° mechanical), low drive voltages (7V), and high fill factors (>96.25%) are achieved for both scanning mirrors. Experimental results of our 1x8 (3x3 collimator array) wavelength-selective switch are also reported. A fiber-to-fiber insertion loss of 6 dB and a switching time of < 700 μsec have been achieved. © 2003 IEEE.Insertion loss; Low voltage; Micromirrors; Mirrors; Optical arrays; Optical collimators; Optical diffraction; Optical fiber losses; Optical surface waves; Optical switchesActuators; Diffraction; Insertion losses; Microsystems; Mirrors; Optical fibers; Optical losses; Optical switches; Optical systems; Scanning; Solid-state sensors; Surface waves; Transducers; Low voltages; Micro mirror; Optical arrays; Optical diffractions; Optical fiber loss; Optical surface waves; Optical collimatorsconference paper10.1109/SENSOR.2003.12171302-s2.0-41549142850