Li M.; Chou Y.-C.YI-CHIA CHOU2022-06-302022-06-30202019448244https://www.scopus.com/inward/record.uri?eid=2-s2.0-85091589014&doi=10.1021%2facsami.0c09922&partnerID=40&md5=8af64060556da2ff0196f86c66468099https://scholars.lib.ntu.edu.tw/handle/123456789/614658Flexible manipulation of the carrier transport behaviors in two-dimensional materials determines their values of practical application in logic circuits. Here, we demonstrated the carrier-type manipulation in field-effect transistors (FETs) containing α-phase molybdenum ditelluride (MoTe2) by a rapid thermal annealing (RTA) process in dry air for hole-dominated and electron-beam (EB) treatment for electron-dominated FETs. EB treatment induced a distinct shift of the transfer curve by around 135 V compared with that of the FET-processed RTA treatment, indicating that the carrier density of the EB-treated FET was enhanced by about 1 order of magnitude. X-ray photoelectron spectroscopy analysis revealed that the atomic ratio of Te decreased from 66.4 to 60.8% in the MoTe2 channel after EB treatment. The Fermi level is pinned near the new energy level resulting from the Te vacancies produced by the EB process, leading to the electron-dominant effect of the MoTe2 FET. The electron-dominated MoTe2 FET showed excellent stability for more than 700 days. Thus, we not only realized the reversible modulation of carrier-type in layered MoTe2 FETs but also demonstrated MoTe2 channels with desirable performance, including long-term stability. Copyright © 2020 American Chemical Society.Computer circuits; Electrons; Field effect transistors; Flexible electronics; Molybdenum compounds; Rapid thermal annealing; Rapid thermal processing; X ray photoelectron spectroscopy; Atomic ratio; Flexible manipulations; Long term stability; Molybdenum ditelluride; Rapid thermal annealing (RTA); Transfer curves; Transport behavior; Two-dimensional materials; Tellurium[SDGs]SDG7journal article10.1021/acsami.0c09922328649502-s2.0-85091589014