A novel fabrication method for suspended high-aspect-ratio MEMS structures

Dept. of Mech. Eng., National Taiwan Univ.Kuo, Wen-ChengWen-ChengKuoYang, Yao-JoeYao-JoeYang2007-04-192018-06-282007-04-192018-06-282005-06http://ntur.lib.ntu.edu.tw//handle/246246/200704191001389application/pdf691700 bytesapplication/pdfen-USA novel fabrication method for suspended high-aspect-ratio MEMS structuresjournal article10.1109/SENSOR.2005.1497274http://ntur.lib.ntu.edu.tw/bitstream/246246/200704191001389/1/01497274.pdf