Template Effects on Low k Materials Made from Spin-on Mesoporous Silica

Ting, C.-Y.C.-Y.TingOuyan, D.-F.D.-F.OuyanWu, W.-F.W.-F.WuWan, B.-Z.B.-Z.Wan2008-12-172018-06-282008-12-172018-06-282003http://ntur.lib.ntu.edu.tw//handle/246246/92228en-USTemplate Effects on Low k Materials Made from Spin-on Mesoporous Silicajournal article