Computational Study of the Effect of Finger Width and Aspect Ratios for the Electrostatic Levitating Force of MEMS Combdrive

Liao, Y.S.Y.S.LiaoChyuan, S,W.S,W.ChyuanChen, J.T.J.T.ChenLiaoYS2008-11-262018-06-282008-11-262018-06-282005http://ntur.lib.ntu.edu.tw//handle/246246/86977application/pdf1092164 bytesapplication/pdfen-USComputational Study of the Effect of Finger Width and Aspect Ratios for the Electrostatic Levitating Force of MEMS Combdrivejournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/86977/1/40.pdf