Red-green-blue MOSLED made by PECVD grown SiOx with detuning RF plasma power

Cheng, C.-H.C.-H.ChengLai, B.-H.B.-H.LaiGONG-RU LIN2018-09-102018-09-102010http://www.scopus.com/inward/record.url?eid=2-s2.0-77957813618&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/358002Red-green-blue MOSLED made by PECVD grown SiOx with detuning RF plasma powerconference paper