Investigation of PZT/Si wafer micro milling using diamond coated tool

YAO-YANG TSAI2018-09-102018-09-102014http://www.scopus.com/inward/record.url?eid=2-s2.0-84908868626&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/385717Investigation of PZT/Si wafer micro milling using diamond coated toolconference paper10.1115/MSEC2014-4087