A miniature micro-machined millimeter-wave bandpass filter by complementary metal-oxide-semiconductor compatible inductively-coupled-plasma deep-trench technology

Chang, J.-F.J.-F.ChangLin, Y.-S.Y.-S.LinChen, C.-C.C.-C.ChenChen, C.-Z.C.-Z.ChenWang, T.T.WangSHEY-SHI LU2018-09-102018-09-102008http://www.scopus.com/inward/record.url?eid=2-s2.0-38549157093&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/341080A miniature micro-machined millimeter-wave bandpass filter by complementary metal-oxide-semiconductor compatible inductively-coupled-plasma deep-trench technologyjournal article10.1143/JJAP.47.68