Wettability of amorphous diamond-like carbons deposited on Si and PMMA in pulse-modulated plasmas

Sung T.-L.Yang J.H.-C.Teii K.Teii S.Liu C.-M.WAN-YU TSENGLI-DEH LINOno S.2021-07-052021-07-0520120093-3813https://www.scopus.com/inward/record.uri?eid=2-s2.0-84863718555&doi=10.1109%2fTPS.2012.2196057&partnerID=40&md5=98979d279f2a8d89465b9d1702520d8ehttps://scholars.lib.ntu.edu.tw/handle/123456789/569288Wettability of amorphous diamond-like carbons deposited on Si and PMMA in pulse-modulated plasmasjournal article10.1109/TPS.2012.21960572-s2.0-84863718555