2012-11-012024-05-15https://scholars.lib.ntu.edu.tw/handle/123456789/664139摘要：本計畫將探討表面聲波元件於感測器的應用。由於聲波元件本身特性的優勢，利用表面聲波技術來實現感測器元件，無論在氣體、液體，或是生物方面的檢測都已有相當多的研究成果以及產品，目前的研究重點，鎖定豐富元件感測的多樣性、適用性，以及進一步提升感測器元件的靈敏度、解析度、選擇性等。如欲提升競爭優勢，勢必提升相關的理論分析、製程研究及設計能力。 本研究計畫將整合且有系統地包含理論建立、數值計算、元件製作及實驗量測。理論分析以矩陣法簡潔的表現方式配合耦合理論模型的計算，模擬分析交指叉狀換能器的頻率響應，並進而導入聲電效應的擾動，探討表面導電率變化對插入損失的影響，做為元件光電效應的探討。實驗量測方面，實際以微機電製程製作表面聲波感測器，完成頻率響應及感測效應的量測，並評估其靈敏度及試用範圍。此外，並採用寬頻指叉狀換能器的設計，實現省時量測、高空間解析度的多點式及多波長感測器。<br> Abstract: In this project, the application of surface acoustic wave devices to photodetectors is investigated. By applying the matrix method, the characteristics of surface wave propagation are discussed. With the coupling-of-mode model and acoustoelectric effect considered, the responses of the SAW photodetector can be simulated. The phtodetectors will be fabricated by MEMS process with the chosen of high coupling coefficient piezoelectric substrate and the deposition of high light sensitivity photoelectric over-layer. The optical responses are then measured to estimate the ability of light sensitivity. Furthermore, the wireless system will be built to transform the signal of the device which will make the device has the potential for industrial applications.表面聲波寬頻表面聲波元件光感測器紫外光氧化鋅溫度濕度SAWSFITphotodetectorultraviolet lightZnOtemperaturehumidity