Design and implementation of a new six-DOF Maglev positioner with a fluid bearing

Chen, M.-Y.M.-Y.ChenHuang, S.-C.S.-C.HuangHung, S.-K.S.-K.HungFu, L.-C.L.-C.FuLI-CHEN FU2018-09-102018-09-102011http://www.scopus.com/inward/record.url?eid=2-s2.0-79955865833&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/365107Design and implementation of a new six-DOF Maglev positioner with a fluid bearingjournal article10.1109/TMECH.2011.2121917