Micromechanical disk array for enhanced frequency stability against bias voltage fluctuations

Wu, L.L.WuAkgul, M.M.AkgulLi, W.-C.W.-C.LiLin, Y.Y.LinRen, Z.Z.RenRocheleau, T.T.RocheleauNguyen, C.T.-C.C.T.-C.NguyenWEI-CHANG LI2020-04-282020-04-282013https://scholars.lib.ntu.edu.tw/handle/123456789/486404[SDGs]SDG7Micromechanical disk array for enhanced frequency stability against bias voltage fluctuationsconference paper10.1109/EFTF-IFC.2013.67022982-s2.0-84893240698https://www.scopus.com/inward/record.uri?eid=2-s2.0-84893240698&doi=10.1109%2fEFTF-IFC.2013.6702298&partnerID=40&md5=da4b497e6caeef70f456c3809b5d3d75