Graph-based subfield scheduling for electron-beam photomask fabrication

Fang, S.-Y.S.-Y.FangChen, W.-Y.W.-Y.ChenYAO-WEN CHANG2018-09-102018-09-102013http://www.scopus.com/inward/record.url?eid=2-s2.0-84873814333&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/380155Graph-based subfield scheduling for electron-beam photomask fabricationjournal article10.1109/TCAD.2013.22379472-s2.0-84873814333WOS:000314677400003