Batch Sequencing for Run-to-Run Control: Application to Chemical Mechanical Polishing

Chen, Yih-HangYih-HangChenSu, An-JhihAn-JhihSuShiu, Sheng-JyhSheng-JyhShiuYu, Cheng-ChingCheng-ChingYuShen, Shih-HaurShih-HaurShen2008-12-242018-06-282008-12-242018-06-282005http://ntur.lib.ntu.edu.tw//handle/246246/93205application/pdf419192 bytesapplication/pdfen-USBatch Sequencing for Run-to-Run Control: Application to Chemical Mechanical Polishingjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/93205/1/42.pdf