Metal micromechanical filter-power amplifier utilizing a displacement-amplifying resonant switch

Li, W.-C.W.-C.LiLin, Y.Y.LinNguyen, C.T.-C.C.T.-C.NguyenWEI-CHANG LI2020-04-282020-04-282013https://scholars.lib.ntu.edu.tw/handle/123456789/486401Metal micromechanical filter-power amplifier utilizing a displacement-amplifying resonant switchconference paper10.1109/Transducers.2013.66273062-s2.0-84891684464https://www.scopus.com/inward/record.uri?eid=2-s2.0-84891684464&doi=10.1109%2fTransducers.2013.6627306&partnerID=40&md5=77dae7eb941ede8d53b56cc3cff1deff