Electrical characterisation of the insulating property of Ta2O5 in Al-Ta2O5-SiO2-Si capacitors by a low-frequency C/V technique

JENN-GWO HWU2018-09-102018-09-101990http://www.scopus.com/inward/record.url?eid=2-s2.0-0025502620&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/288952Electrical characterisation of the insulating property of Ta2O5 in Al-Ta2O5-SiO2-Si capacitors by a low-frequency C/V techniquejournal article