Predictive formulae for OPC with applications to lithography-friendly routing

Chen, T.-C.T.-C.ChenLiao, G.-W.G.-W.LiaoYAO-WEN CHANG2018-09-102018-09-102010http://www.scopus.com/inward/record.url?eid=2-s2.0-73249135593&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/358160Predictive formulae for OPC with applications to lithography-friendly routingjournal article10.1109/TCAD.2009.20323592-s2.0-73249135593WOS:000272998400005