A Novel Method for Evaluating the Thickness of Silicon Membrane Using a Micromachined Acoustic Wave Sensor

Lee, Chi-YuanChi-YuanLeeCheng, Ying-ChouYing-ChouChengWu, Tsung-TsongTsung-TsongWuChen, Yung-YuYung-YuChenChen, Wen-JongWen-JongChenPao, Shih-YungShih-YungPaoChang, Pei-ZenPei-ZenChangChen, Ping-HeiPing-HeiChenYen, Kai-HsiangKai-HsiangYenXiao, Fu-YuanFu-YuanXiao2008-10-282018-06-282008-10-282018-06-282004http://ntur.lib.ntu.edu.tw//handle/246246/85695http://ntur.lib.ntu.edu.tw/bitstream/246246/85695/1/17.pdfapplication/pdf206819 bytesapplication/pdfen-USA Novel Method for Evaluating the Thickness of Silicon Membrane Using a Micromachined Acoustic Wave Sensorjournal article2-s2.0-2942729810http://ntur.lib.ntu.edu.tw/bitstream/246246/85695/1/17.pdf