Accurate submicron edge detection using the phase change of a nano-scale shifting laser spot

Hai, H.H.H.H.HaiChen, L.-C.L.-C.ChenNguyen, D.T.D.T.NguyenLin, S.-T.S.-T.LinYeh, S.L.S.L.YehYao, Y.Y.YaoLIANG-CHIA CHEN2020-01-132020-01-132017https://scholars.lib.ntu.edu.tw/handle/123456789/447820Accurate submicron edge detection using the phase change of a nano-scale shifting laser spotjournal article10.1016/j.optlastec.2017.01.0062-s2.0-85010297074https://www.scopus.com/inward/record.uri?eid=2-s2.0-85010297074&doi=10.1016%2fj.optlastec.2017.01.006&partnerID=40&md5=7250d52fdc3d910001d7365c8a7a4f11