GeSn N-FinFETs and NiGeSn contact formation by phosphorus implant

Chuang, Y.Y.ChuangHuang, H.-C.H.-C.HuangJIUN-YUN LI2020-06-112020-06-112017https://scholars.lib.ntu.edu.tw/handle/123456789/498464GeSn N-FinFETs and NiGeSn contact formation by phosphorus implantconference paper10.23919/SNW.2017.82423152-s2.0-85051040284https://www.scopus.com/inward/record.uri?eid=2-s2.0-85051040284&doi=10.23919%2fSNW.2017.8242315&partnerID=40&md5=0c540d3fca66bf738a84b34c118b6c15