Vibration Measurement and Suppression for Laser Galvanometers Using a Mems-Based Accelerometer

Y.-L. HsuS.-C. YangP.-H. ChouH.-C. ChangY.-C. KuoL.-F. ChiuSHIH-CHIN YANG2021-11-222021-11-222017https://scholars.lib.ntu.edu.tw/handle/123456789/587603Vibration Measurement and Suppression for Laser Galvanometers Using a Mems-Based Accelerometerconference paper