The comprehensive study and the reduction of contact resistivity on the n-InGaAs M-I-S contact system with different inserted insulators

Liao, M.-H.M.-H.LiaoLien, C.C.LienMING-HAN LIAO2020-01-132020-01-132015https://scholars.lib.ntu.edu.tw/handle/123456789/447956The comprehensive study and the reduction of contact resistivity on the n-InGaAs M-I-S contact system with different inserted insulatorsjournal article10.1063/1.49210232-s2.0-84929630311https://www.scopus.com/inward/record.uri?eid=2-s2.0-84929630311&doi=10.1063%2f1.4921023&partnerID=40&md5=0062af3f151ab18eb19c88ebee49b5df