Structural investigation of ZnO:Al films deposited on the Si substrates by radio frequency magnetron sputtering

Chen, Y.Y.Y.Y.ChenYang, J.R.J.R.YangCheng, S.L.S.L.ChengShiojiri, M.M.ShiojiriJER-REN YANG2020-05-122020-05-122013https://scholars.lib.ntu.edu.tw/handle/123456789/491565[SDGs]SDG7Structural investigation of ZnO:Al films deposited on the Si substrates by radio frequency magnetron sputteringjournal article10.1016/j.tsf.2013.07.0792-s2.0-84884984387https://www.scopus.com/inward/record.uri?eid=2-s2.0-84884984387&doi=10.1016%2fj.tsf.2013.07.079&partnerID=40&md5=1fc3b3416b1ccc3966df07e6f5196d0b