Double Laser Crystallization of Pre-patterned Amorphous Silicon Film and Amorphous Silicon Film with A Patterned Assisting SiO2 Layer

L.XuJ.W. ChungC. GrigoropoulosLI XU2021-10-072021-10-072004https://scholars.lib.ntu.edu.tw/handle/123456789/584213Charlotte, North Carolina, USADouble Laser Crystallization of Pre-patterned Amorphous Silicon Film and Amorphous Silicon Film with A Patterned Assisting SiO2 Layerconference paper