A MEMS doubly decoupled gyroscope with wide driving frequency range

Tsai, C.-W.C.-W.TsaiChen, K.-H.K.-H.ChenShen, C.-K.C.-K.ShenTsai, J.-C.J.-C.TsaiJUI-CHE TSAI2018-09-102018-09-102012http://www.scopus.com/inward/record.url?eid=2-s2.0-84863739524&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/372489A MEMS doubly decoupled gyroscope with wide driving frequency rangejournal article10.1109/TIE.2011.2177612