Shen J.-C.Jywe W.-Y.Liu C.-H.Jian Y.-T.Deng Y.-F.Yang Y.-T.Wen-Yuh Jywe2022-05-242022-05-242005https://www.scopus.com/inward/record.uri?eid=2-s2.0-79960736838&partnerID=40&md5=9d89ebb6821d688d15a5b715208a1637https://scholars.lib.ntu.edu.tw/handle/123456789/611988This paper presents the design of an integral sliding-mode controller for a piezoelectric-actuated system. The sliding-mode disturbance (uncertainty) estimation and compensation scheme is used. The nonlinear piezoelectric-actuated system is modeled as a first order linear model coupled with a hysteresis. When the model is identified, the hysteresis nonlinearity is linearized then the linear system model with uncertainty is used to design the sliding-mode controller. The structure of the proposed controller is as simple as the PID controller. Thus, it can be implemented easily. This design method is applied to the motion control of a nano-stage and experimental results are presented. Copyright ? 2005 IFAC.Design methodEstimation and compensationFirst orderHysteresis nonlinearityLinear modelLinear system modelMotion stageNano-stageNonlinearPID controllersPrecisionSliding mode controllerSliding modesAutomationDesignHysteresisLinear systemsPiezoelectricityProportional control systemsSliding mode controlControllersconference paper2-s2.0-79960736838