Kuo, W.-C.W.-C.KuoHsu, C.-Y.C.-Y.HsuYang, Y.-J.Y.-J.YangYAO-JOE YANG2020-01-132020-01-132012https://scholars.lib.ntu.edu.tw/handle/123456789/448488New fabrication method for high-Q MEMS inductorsconference paper10.1115/IMECE2012-891692-s2.0-84887279914https://www.scopus.com/inward/record.uri?eid=2-s2.0-84887279914&doi=10.1115%2fIMECE2012-89169&partnerID=40&md5=e5a63b3966ebd9dcb897ce22d31de9f8