A Six-degree-of-freedom Measurement System for the Motion Accuracy of Linear Stages

Fan, K.C.K.C.FanChen, M.J.M.J.ChenHuang, W.M.W.M.Huang2008-11-182018-06-282008-11-182018-06-281998http://ntur.lib.ntu.edu.tw//handle/246246/86572application/pdf357389 bytesapplication/pdfen-USA Six-degree-of-freedom Measurement System for the Motion Accuracy of Linear Stagesjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/86572/1/03.pdf