蘇國棟臺灣大學：光電工程學研究所洪紹軒Hung, Shao-HsuanShao-HsuanHung2007-11-252018-07-052007-11-252018-07-052005http://ntur.lib.ntu.edu.tw//handle/246246/50699微機電系統 (MEMS) 科技已經被證明能夠用來製作出可靠的光纖通訊元件。光學微機電式元件能夠比傳統的光學機械式元件有更快的運作速度。在光通訊系統中，可變式光衰減器 (VOA) 是一種很重要的元件。本論文主要是探討光開關式微機電可變光衰減器。 論文內容包含四個部份： 1.介紹可變式光衰減器與回顧各種不同操作原理的可變式光衰減器。 2.討論微機電製程的流程與不同的微機電製程技術。 3.說明我們的可變式光衰減器的製作流程以及量測上的結果。 4.探討我們的可變式光衰減器的機械模擬模型與光學模擬模型，實際去模擬這兩個模型並且討論模擬上所運用的原理。結合機械模擬與光學模擬的結果，可以得到動態衰減範圍對應於供應電流的模擬情況。 和實驗上量測得到的結果相比對，可以發現理論上的模擬結果與量測值非常吻合。Micro-electro-mechanical Systems (MEMS) technology has been demonstrated to make reliable components for fiber-optic communications. Optical MEMS devices can operate at a higher speed than traditional optomechanical ones. A variable optical attenuator is one of the important devices for optical communications systems. In this thesis, I will talk about optical-shutter-type MEMS VOAs. This thesis consists of four parts: 1.Introduce VOAs and review different kinds of VOAs based on different principles. 2.Discuss the basis of MEMS fabrication process and micromachining. 3.Show the fabrication process of our VOA and the measurement results. 4.Discuss the mechanical and optical simulation models of our VOA and go through the principles behind the simulation. Based on the results of the mechanical and optical simulation, the dynamic range of attenuation versus current can be obtained. It is found that the theoretical calculations agree well with experimental results.中文摘要 Ⅰ Abstract Ⅱ 致謝 Ⅲ Contents Ⅳ List of Figures Ⅵ List of Tables Ⅸ Chapter 1: Introduction 1 1.1 Optical Fiber Communications Systems 1 1.2 Micro Electro Mechanical Systems 3 1.3 Optical MEMS 4 1.4 Organization of This Thesis 5 Chapter 2: Variable Optical Attenuator 6 2.1 Planar-lightwave-circuit (PLC) VOA 7 2.2 Acoustooptic VOA 8 2.3 Liquid Crystal VOA 9 2.4 Refractive VOA 10 2.5 Reflective VOA 12 2.6 Optical-shutter-type MEMS VOA 13 2.7 Specifications of VOAs 14 2.8 Summary 16 Chapter 3: Micromachining Fabrication Process 18 3.1 Basics of Micromachining Processes 18 3.2 Bulk Micromachining 22 3.3 Surface Micromachining 24 3.4 Deep Reactive Ion Etching (DRIE) 26 Chapter 4: Fabrication and Measurement 30 4.1 Fabrication Process 30 4.2 Measurement 35 Chapter 5: Mechanical and Optical Simulations 38 5.1 Mechanical Model 38 5.2 Propagation of Light Inside the VOA 42 5.3 ZEMAX 45 5.4 Optical Simulation Model 48 Chapter 6: Conclusion 56 6.1 Summary 56 6.2 Future Work 57 References 58en-US微機電系統可變式光衰減器MEMSVOAthesis